"Filling and Slotting: Analysis and Algorithms" * "IC Layout and Manufacturability: Critical Links and Design Flow Implications" * "New and Exact Filling Algorithms for Layout Density Control" * "New Multilevel and Hierarchical Algorithms for Layout Density Control" * "Optimal Phase Conflict Removal for Layout of Dark Field Alternating Phase Shifting Masks"
preview:
http://www.blaze-dfm.com/technology/research_papers.html
5/24/2006
